Mass flow controllers (MFCs) were originally designed to take the guess work out of precision gas flow control. Today, the demand for accurate and repeatable gas flow control has spanned dozens of industries. Demand for mass flow controllers is growing and customers are requiring that MFCs are easy to use, fast, reliable, accurate, cost effective and robust.
The Alicat Scientific Mass Flow Controllers are especially well suited for vacuum coating applications. These would include vacuum sputtering, e-beam evaporation, or chemical vapor deposition(CVD). We can do secondary outputs for pressure or temperature should you also need to monitor inline pressure. Alicat Scientific Mass Flow Controller can control 30 gases. One gas should be specified for the primary gas calibration. A 115V/60Hz power cable is available to power the unit.
The Alicat MC/ MCR/ VC & VCR series mass flow controller is designed to meet the above requirements:
Measured Parameters
• MC & MCR Series Mass Flow Controller products
• Mass Flow
• Volumetric Flow
• Pressure (PSIA)
• Temperature (° Celsius or ° Farenheit)
• VC & VCR Series Volumetric Flow Meter products
• Volumetric Flow
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